The POU3500 procedure delivers dynamic temperature control of the procedure chamber cathode / electrode / anode and may be synchronized with any etch course of action.
Device & TCU software program calibration processes range exterior examination devices not employed on a regular basis for verifying
With all the POU3500, you are able to reach unprecedented brings about etch efficiency, chamber uptime, decreased cost of possession and fab Area utilization – all though strengthening your approach trustworthiness.
We embrace individual accountability and accept responsibility for prudent chance having. We motivate particular values, which guidebook us to continually meet up with the commitments we make and we endeavor to deal with Those people with whom we connect with respect as we wish to be dealt with ourselves.
This amazing procedure, offering a small type aspect, low Cost-of-possession and Dynamic Temperature Handle supplied system and devices engineers a completely new Software to improve their temperature sensitive procedures.
We are guided within our belief that prosperity On this aggressive marketplace stems from delivering buyers with highly engineered new merchandise and planet class customer service.
All static TCUs involve extra cooling & heating capacities due to their really massive system fluid reservoirs. the procedure fuid reservoir on LAUDA-Noah's dynamic temperature Command method is fewer than one gallon.
With our device strategically mounted somewhere around six ft with the chamber, we reach a way more exact reading through on the chuck temperature. This method makes sure regular temperature throughout the production good deal, leading to improved wafer-to-wafer CD uniformity.
big Footprint: Static units occupy substantial Area in the fabrication Resource location, cutting down its efficiency.
LAUDA-Noah is Assembly these new worries and has integrated Electrical power conserving technologies in systems which are helpful into the natural environment and have a cheap to work.
The data established Here's from a 200mm quantity manufacturing wafer fab and Plainly illustrates the benefit of the LAUDA-Noah POU procedure.
The POU3300 procedure gives dynamic temperature Charge of the method chamber cathode / electrode / anode and will be synchronized with any etch procedure.
the fact is always that real Dynamic Temperature Command can only be achieved when all 5 (five) of the following technique style and design and set up requirements are fulfilled:
looking at cost-free films online is read more a hassle-free and frugal method to see the films you like ideal within the consolation of your own Home.
We call for much less cooling/heating capability for the same application to be a static TCU on account of our compact reservoir quantity.